Phenomprox sem

PhenomProx SEM, F. Prada, Feb 20, 2024

  1. Remember to always bring your own USB. Possibly empty and rest USB before using it so we are sure there are no viruses.
  2. Turn SEM on and wait 5 minutes until light stops blinking.
  3. Place carbon sticker (black and round) on sample holder.
  4. Distribute dry sample evenly on carbon sticker.
  5. Blow sample holder with air spray to remove any unattached particles.
  6. Place sample holder on SEM holder. Use BLACK holder for uncharged samples and GREY for charged samples. We usually use the BLACK holder but if we see that the image has bad quality then it means our sample is charged so we need to use the GREY holder.
  7. Screw grey round piece until the sample is right below the edge and then screw down another notch (use indicator on the holder as a reference).
  8. Lift door and insert sample inside the SEM.
  9. Image sample. Go to SETTINGS and set: A. MODE: high resolution (10 kV) B. INTENSITY: image (use POINT for very high resolution) C. DETECTOR: BSD Full. If we use the BLACK sample holder we can use the SED setting which provides better resolution D. RENAME SAMPLE
  10. Map the sample by zig-zagging across the desired field.
  11. Switch from optical to SEM mode.
  12. Set image as we like in terms of location, focus, brightness, contrast etc.. For automatic adjustment of these settings press buttons for 3 seconds until “A” pops up on the icon.
  13. When the image is ready and we no longer need to modify it we can proceed with the elemental analysis. If we need to analyse a very specific section of the sample, INTENSITY should be set to LOW. Resolution is ok at 1024.
  14. Go to SETTINGS and set MODE to Analysis (15kV)
  15. Open the PhenomPro software on the other screen and click on the open circle.
  16. Click on area of interest and wait a few seconds until the elemental analysis pops up.
  17. If we click on the right arrow on the top right hand corner we can visualize the elemental analysis.
  18. Before closing the software save all the data by clicking on NEW and then SAVE PROJECT. This will create a report (Word format) showing the elemental analysis data of the areas you have selected.

If you need to restart the SEM press Ctrl Alt F4, then wait a few seconds and on next black screen press Ctrl Alt delete.

Written on March 2, 2026